An Introduction to MEMS Technology

Name: An Introduction to MEMS Technology
Brand: LAP Lambert Academic Publishing
SKU: 9783659247002
Price: 17604 HUF
Availability: InStock

Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications

Szerző: Avigyan Datta Gupta, Chirashree Roy Chowdhury

Nyelv:

Kötés: Puha kötésű

Kiadó: LAP Lambert Academic Publishing

Elérhetőség: Kiadói készleten rendelésre

Küldés 17-27 napon belül

17 604 Ft

Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical...

Információk a könyvről

Szerző

Avigyan Datta Gupta, Chirashree Roy Chowdhury

Nyelv

Angol

Kötés

Könyv - Puha kötésű

Kiadva

2012

oldal

100

EAN

9783659247002

Enbook ID

06917444

Kiadó

LAP Lambert Academic Publishing

Súly

165

Méretek

150 x 220 x 6

Teljes leírás

Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale.In this book a detailed description of the design and analysis of MEMS based microheater array on SOI wafer for gas sensor application is proposed.MEMS based array of microheaters of SOI wafer have an added advantage which increases the efficiency of the microheater i.e less power is required to reach high temperature and also the thermal loss is minimized.They are usually produced using a standard CMOS process, have the additional advantages of being readily realized by commercial foundries and amenable to the inculsion of on-chip electronics.

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An Introduction to MEMS Technology

Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications

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Teljes leírás

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Azok a vásárlók, akik ezt a könyvet megvásárolták, a következőket is megvásárolták