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Könyv Ion Implantation and Synthesis of Materials Michael Nastasi

Ion Implantation and Synthesis of Materials

Szerző: Michael Nastasi, James W. Mayer
Nyelv: Angol
Kötés: Kemény kötésű
Kiadó: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Elérhetőség: Beszállítói készleten
Küldés 10-13 napon belül
39 517 Ft
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some i...

Információk a könyvről

Szerző
Michael Nastasi, James W. Mayer
Nyelv
Angol
Kötés
Könyv - Kemény kötésű
Kiadva
2006
oldal
263
EAN
9783540236740
ISBN
3540236740
Enbook ID
01560012
Kiadó
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Súly
580
Méretek
242 x 165 x 27

Teljes leírás

Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification topics, such as ion-beam mixing, stresses, and sputtering, are also described.

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