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Könyv Lithography Techniques Suman Kumari

Lithography Techniques

Szerző: Suman Kumari, Diwakar Padalia
Nyelv: Angol
Kötés: Puha kötésű
Kiadó: LAP LAMBERT Academic Publishing
Elérhetőség: Beszállítói készleten
Küldés 5-8 napon belül
15 264 Ft
In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more de...

Információk a könyvről

Szerző
Suman Kumari, Diwakar Padalia
Nyelv
Angol
Kötés
Könyv - Puha kötésű
Kiadva
2024
oldal
64
EAN
9786207471195
ISBN
6207471199
Enbook ID
45657300
Kiadó
LAP LAMBERT Academic Publishing
Súly
113
Méretek
150 x 220 x 4

Teljes leírás

In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more devices have become a necessity for men for healthcare, a pleasant lifestyle, and to do tasks quickly and easily. Different types of temperature sensors, biosensors, photosensors, etc. have been developed to meet the necessities of the people. All these devices have chips inside them fabricated using diodes, transistors, logic gates, and ICs. The patterning of the substrate which is used for the further development of these devices is done with the help of a technique known as Lithography. In the present work, we have done a review on different types of lithographic techniques like optical lithography, extreme ultraviolet lithography, electron beam lithography, x-ray lithography, and ion beam lithography. The evolutions made in these techniques with time and applications of these techniques in device fabrication are discussed. Different exposure tools developed in the last decade to enhance the resolution of the devices are also discussed. Chemically amplified and non-chemically amplified resists with their bonding and thickness are discussed.

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