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Könyv Materials and Processes for Next Generation Lithography Alex Robinson

Materials and Processes for Next Generation Lithography

Szerző: Alex Robinson
Nyelv: Angol
Kötés: Kemény kötésű
Kiadó: Elsevier Health Sciences
Elérhetőség: Beszállítói készleten
Küldés 10-18 napon belül
69 464 Ft
These developments in both the industrial and the academic lithography arenas have led to the prolif...

Információk a könyvről

Szerző
Alex Robinson
Nyelv
Angol
Kötés
Könyv - Kemény kötésű
Kiadva
2016
oldal
634
EAN
9780081003541
ISBN
0081003544
Enbook ID
10000207
Kiadó
Elsevier Health Sciences
Súly
1450
Méretek
152 x 229 x 35

Teljes leírás

These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various communities to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigationIncludes information on processing and metrology techniquesBrings together multiple approaches to litho pattern recording from academia and industry in one place

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