This book presents the select peer-reviewed proceedings of the 13th International Conference on Precision, Micro, Meso and Nano Engineering (COPEN 2024). It covers the latest research in the advanced and convectional manufacturing techniques such as micromachining, nanofinishing, microjoining, microforming, microforging, microcasting, additive microfabrication, high aspect ratio fabrication, lithography, LIGA, micro/nanometrology, micro- and nanosystem applications. It also covers the characterization techniques that are equally essential in micro and nano manufacturing, enabling researchers and engineers to assess the properties and quality of fabricated structures. The book further delves into the applications of micro and nano manufacturing in a wide range of industries such as electronics, telecommunications, healthcare, energy, semiconductor devices, advanced sensors and high-density data storage solutions. The book will be highly useful for researchers and professionals in the area of industrial and production engineering.