Microelectronic Processing

Name: Microelectronic Processing
Brand: American Chemical Society
SKU: 9780841214750
Price: 21422 HUF
Availability: InStock

Szerző: Dennis W. Hess, Klaus F. Jensen

Nyelv:

Kötés: Kemény kötésű

Kiadó: American Chemical Society

Elérhetőség: 50 % esély

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Although chemical engineering principles are at the heart of solid state process technology, until n...

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Szerző

Dennis W. Hess, Klaus F. Jensen

Nyelv

Angol

Kötés

Könyv - Kemény kötésű

Kiadva

1989

oldal

524

EAN

9780841214750

ISBN

0841214751

Enbook ID

04736205

Kiadó

American Chemical Society

Súly

884

Méretek

159 x 235 x 31

Teljes leírás

Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved-liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.-this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

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