Könyv Nanofabrication Maria Stepanova

Nanofabrication

Techniques and Principles

Nyelv: Angol
Kötés: Kemény kötésű
Elérhetőség: Beszállítói készleten
Küldés 10-13 napon belül
57 749 Ft
Intended to update scientists and engineers on the current state of the art in a variety of key tech...

Információk a könyvről

Nyelv
Angol
Kötés
Könyv - Kemény kötésű
Kiadva
2011
oldal
344
EAN
9783709104231
ISBN
3709104238
Enbook ID
01705636
Súly
672
Méretek
161 x 243 x 25

Teljes leírás

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

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