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Könyv Predictive Simulation of Semiconductor Processing Jarek Dabrowski

Predictive Simulation of Semiconductor Processing

Status and Challenges

Szerző: Jarek Dabrowski, Eicke R. Weber
Nyelv: Angol
Kötés: Puha kötésű
Kiadó: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Elérhetőség: Beszállítói készleten
Küldés 5-8 napon belül
84 576 Ft
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Információk a könyvről

Szerző
Jarek Dabrowski, Eicke R. Weber
Nyelv
Angol
Kötés
Könyv - Puha kötésű
Kiadva
2010
oldal
490
EAN
9783642058042
ISBN
3642058043
Enbook ID
01651135
Kiadó
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Súly
859
Méretek
155 x 235 x 28

Teljes leírás

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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