Angol
This is an excellent textbook presenting the fundamentals of Radio Frequency Micro-electro Mechanical Systems required by every practicing MEMS engineer. The author treats the arduous concepts of coupled electrical and mechanical systems. The book elucidates the concepts with very topical examples of microelectromechanical systems such as MEMS filters and it's magnetic effetcs including circuit models and simulation concepts are eleborated. Microwave and millimeter wave technology is rapidly growing nowadays. Quite a lot of investigations are paying attention on miniaturization of microwave devices while retaining their performance. So, RF MEMS technology have emerged as enabling technology for low loss and low power consumption. It finds its applications in the design of multifunctional wireless and satellite communication systems and RF MEMS refers to components of which freestanding or moving sub-millimeter-sized parts provide RF functionality.
