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Sensitivity Analysis for Grating Reconstruction

Name: Sensitivity Analysis for Grating Reconstruction
Brand: VDM Verlag
SKU: 9783639019452
Price: 20652 HUF
Availability: InStock

Finding Analytical Field Amplitude Derivatives by Using RCWA

Szerző: Nico van der Aa

Nyelv:

Kötés: Puha kötésű

Kiadó: VDM Verlag

Elérhetőség: Kiadói készleten rendelésre

Küldés 17-27 napon belül

20 652 Ft

Periodic structures, called diffraction gratings, play an important role in optical lithography. Whe...

Információk a könyvről

Szerző

Nico van der Aa

Nyelv

Angol

Kötés

Könyv - Puha kötésű

Kiadva

2008

oldal

148

EAN

9783639019452

ISBN

3639019458

Enbook ID

06811851

Kiadó

VDM Verlag

Súly

209

Méretek

152 x 229 x 8

Teljes leírás

Periodic structures, called diffraction gratings, play an important role in optical lithography. When the incident field and the shape of a grating is known, the diffracted field can be computed by using the rigorous coupled-wave analysis (RCWA) or the C method. These so-called forward models solve Maxwell's equations for time-harmonic fields by transforming them into algebraic eigensystems.§§The reconstruction of a grating shape starts with an initial guess of its shape. The diffracted field is computed with the forward model and compared to actual measurements. The difference between them determines how the shape parameters should be adjusted. This will be repeated iteratively until an optimal solution has been found.§§The focus of this work lies in finding the first-order derivatives of the diffracted field with respect to the physical parameters. This can be done by finite differences, but straightforward differentiation of the relations within RCWA gives a more accurate and faster way to find these derivatives. Periodic structures, called diffraction gratings, §play an important role in optical lithography. When §the incident field and the shape of a grating is §known, the diffracted field can be computed by using §the rigorous coupled-wave analysis (RCWA) or the C §method. These so-called forward models solve §Maxwell''s equations for time-harmonic fields by §transforming them into algebraic eigensystems.§The reconstruction of a grating shape starts with an §initial guess of its shape. The diffracted field is §computed with the forward model and compared to §actual measurements. The difference between them §determines how the shape parameters should be §adjusted. This will be repeated iteratively until an §optimal solution has been found.§The focus of this work lies in finding the first-§order derivatives of the diffracted field with §respect to the physical parameters. This can be done §by finite differences, but straightforward §differentiation of the relations within RCWA gives a §more accurate and faster way to find these §derivatives.

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Sensitivity Analysis for Grating Reconstruction

Finding Analytical Field Amplitude Derivatives by Using RCWA

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